Facilities
Facilities
BoS (PE-ALD)
SONIC (VHF PE-ALD)
IRON (Thermal-ALD)
SOPE (Thermal-ALD)
MINION (Thermal-ALD)
DJ (Furnace ALD)
Ozone generator
Ellipsometer
H2 Furnace
Chemical cabinet
Contact angle measurment
Quadrupole mass spectrometer
E-beam evaporator 1
Furnace 1
Gas cabinet 1
Gas cabinet 2
Glove box
LPCVD
Optical microscope 1
RTP 1
Probe station (Dark box)
4-point probe station
CCP-RIE 1
ICP-RIE
Scrubber 1
Scrubber 2
PE-CVD
Wet bench
Wet bench 2
Wet bench 3
Aligner 1
E-beam evaporator 2
Optical microscope 2
CCP-RIE 2
CCP-RIE 3
RTP 2
Sputter
Surface profiler
Thermal evaporator
Optical thickness measurement
Singe
Spin coater 1
Spin coater 2
Hot plate