Principal Investigator
Principle Investigator
Il-Kwon Oh
Associate Professor
Department of Intelligence Semiconductor Engineering
Ajou University
Department of Electrical and Computer Engineering
Ajou University
Research Experiences
• Associate Professor, Department of Intelligence Semiconductor Engineering, Ajou University
• Associate Professor, Department of Electrical and Computer Engineering, Ajou University
3/2025 – present
• Assistant Professor, Department of Intelligence Semiconductor Engineering, Ajou University
• Assistant Professor, Department of Electrical and Computer Engineering, Ajou University
3/2021 – 2/2025
• Postdoctoral scholar, Department of Chemical Engineering, Stanford University
10/2018 – 2/2021
• Postdoctoral researcher, School of Electrical and Electronic Engineering, Yonsei University
9/2016 – 8/2018
Education
• Master’s and Doctoral programs in Electrical and Electronic Engineering in School of Yonsei University 3/2012 – 8/2016
• B.S. in School of Electrical and Electronics Engineering, Yonsei University, Korea 3/2007 - 2/2012
'세상 바꾸는 큰 연구’ 위해- 김우중아주학술상, 오일권 교수 첫 수상
新금속물질 세계 최초 개발…반도체 산업의 기술적 한계 돌파구
JACS 7월 표지논문 선정 '분자흡착 메커니즘 규명'
반도체 혁신 아이디어 공모전 수상
반도체 혁신 아이디어 공모전 수상
반도체 장학 증서 수여식
반도체 장학 증서 수여식
Technology Transfer Experiences
• Title: Development of New Concept of Octuple Patterning Technology Process Based on Hard Mask for Sub-7 nm Multi-Patterning Process of 3D NAND flash devices
- Technology transfer company: SK Hynix
- Technology transfer price: $50,000
- Date: 2017/10/11
• Title: Semiconductor equipment of very high frequency atomic layer deposition for SiNx
- Technology transfer company: CN1
- Technology transfer price: $50,000
- Date: 2022/05/01
• Title: Memory devices based on selective HfO2 nanopatterns
- Technology transfer company: Moman
- Technology transfer price: $25,000
- Date: 2023/01/04
• Title: Low temperature atomic layer deposition of metal films
- Technology transfer company: CN1
- Technology transfer price: $100,000
- Date: 2023/07/01
• Title: Equipment Designed for Selective Area Atomic Layer Deposition Technology
- Technology transfer company: Moman
- Technology transfer price: $100,000
- Date: 2024/11/28
Fellowship and Honors
• The 12th Industry-Academic Research Project Excellent Invention Award by SK Hynix, 05/12/2024
- Title:
- Presenter: Sungwook Park (President of SK Hynix)
- Press: [ZDMET Korea] https://zdnet.co.kr/view/?no=20241115171328
• Post-doctor fellowship, School of Electrical and Electronic Engineering, Yonsei University
- Period: 9/2017 - 8/2018
- Fund: Research Affairs/University Industry Foundation, Yonsei University
- Research area: Surface-energy-control-based ALD REO thin films for printed electronics
• Grand Prize (the first place) of the 1st Semiconductor Open Innovation Contest Sponsored by SK Hynix, 10/11/2017
- Title: Development of New Concept of Octuple Patterning Technology Process Based on Hard Mask for Sub-7 nm Multi-Patterning Process of 3D NAND Flash Devices
- Presenter: Sungwook Park (President of SK Hynix)
- Press: [The JoongAng Ilbo] http://news.joins.com/article/22003820
• Best Paper Award, Materials Research Society of Korea, 05/18/2017
- Title: The investigation on AS-ALD Al2O3 nano thin films and reaction mechanism
• Best Paper Award, Materials Research Society of Korea, 11/18/2016
- Title: Improvement of plasma damage by using VHF plasma source during PE-ALD
• Post-doctor fellowship, School of Electrical and Electronic Engineering, Yonsei University
- Period: 9/2016 - 8/2017
- Fund: Research Affairs/University Industry Foundation, Yonsei University
- Research area: Surface-energy-control-based REO membrane for water solution
• Best Paper Award, Korean Crystallographic Association, 11/06/2015
- Title: Transformation of crystalline phase of HfO2 by Er doping
• Best Paper Award, The Korean Institute of Metals and Materials, 10/28/2015
- Title: Analysis of film properties of Sputter Al with varying process parameters and film thickness
• The 9th Korea Semiconductor Fellowship Sponsored by Applied Materials Korea and Korea Semiconductor Industry Association, 9/2014
- Presenter: Yongjin Kim (President of Applied Materials Korea)