Patents
Patents
Granted (Domestic)
22. “Capacitor and Method of Manufacturing Capacitor”, Il-Kwon Oh,
KR 10-2718389, 2024/10/11
21. “Method for Fabricating Semiconductor”, Il-Kwon Oh, Taejin Choi, Hyungjun Kim,
KR 10-2147149, 2020/07/27
20. “Method for antimicrobial coating of wood”, Il-Kwon Oh, Woo-Hee Kim,
KR 10-2097549, 2020/03/10
19. “Method for Fabricating Thin Films”, Il-Kwon Oh, Chang-Mo Yoon, Hyungjun Kim, Han-Bo-Ram Lee, KR-10-194819, 2019/01/22
18. “Method for Depositing Metal Oxide Films Including In Buffer Layers”, Il-Kwon Oh, Seoungi Seo, Yujin Lee, Hyungjun Kim,
KR-10-1898161, 2018/09/06
17. “Method for Depositing Metal Oxide Films By Plasma-Enhanced Atomic Layer Deposition”, Il-Kwon Oh, Seoungi Seo, Yujin Lee, Hyungjun Kim,
KR 10-1884555, 2018/07/26
16. “Electric Device for MIM Capacitor Having Enhanced Electrical Characteristics and Manufacturing Method Thereof”, Il-Kwon Oh, Bo-Eun Park, Han-Bo-Ram Lee, Hyungjun Kim,
KR 10-1752060, 2017/06/22
15. “Method for Modifying Surface of Substrate Using Rare Earth Oxide Thin Film”, Il-Kwon Oh, Han-Bo-Ram Lee, Jun-Ho Choi, Hyugnjun Kim,
KR 10-1751619, 2017/06/21
14. “Filter for Removing Moisture and Method for Manufacturing the Same”, Il-Kwon Oh, Chang-Mo Yoon, Han-Bo-Ram Lee, Hyungjun Kim,
KR 10-1670337, 2016/10/24
13. “Apparatus for Plasma Enhanced Atomic Layer Deposition and Method for Forming Thin Film Oxides Using the Same”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim,
KR 10-1662194, 2016/09/27
12. “Apparatus and Method for Performing Plasma Enhanced Atomic Layer Deposition Employing Very High Frequency”, Il-Kwon Oh, Gil-sang Yoo, Han-Bo-Ram Lee, Hyungjun Kim,
KR 10-1596329, 2016/02/16
11. “Superhydrophobic Coating Materials and Method for Manufacturing the Same”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim,
KR 10-1617396, 2016/04/26
10. “Method for Forming Coating Layer and Coating Material Having Waterproof Property”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim,
KR 10-1615897, 2016/04/21
9. “A Deposition Method of Hafnium-Nitride Using Hydrogen Plasma and Semiconductor Device Using the Same”, Il-Kwon Oh, Hyungjun Kim, Min-Kyu Kim,
KR 10-1504548, 2015/03/16
8. “Epitaxial Growth of Dy-doped Hafnium Oxide”, Il-Kwon Oh, Jae-seung Lee, Hyungjun Kim,
KR 10-1493424, 2015/02/09
7. “Method for Reducing Native Oxide on Substrate and Method for Manufacturing a Semiconductor Device Using the Same”, Il-Kwon Oh, Hyungjun Kim,
KR 10-1455263, 2014/10/21
Granted (International)
6. “Display Device and Fabricating Method Thereof”, Il-Kwon Oh, Seunggi Seo, Ho-Jin Kim, ChoongKeun Yoo, YongBaek Lee, Hyungjun Kim, EP 3,179,530 B1 (application number: 16201360.1), 2017/06/14
5. “Advanced precursors for selective atomic layer deposition using self-assembled monolayers”, Il-Kwon Oh, Stacey F Bent US 17516139, 2022/5/5
4. “New precursors for selective atomic layer deposition of metal oxides with small molecule inhibitors”, Josiah Yarbrough, Il-Kwon Oh, Stacey F Bent, US 17514788, 2022/5/5
3. “Display Device and Fabricating Method Thereof”, Il-Kwon Oh, Seunggi Seo, Ho-Jin Kim, ChoongKeun Yoo, YongBaek Lee, Hyungjun Kim, US 10,396,309 B2, 2019/08/27
2. “Superhydrophobic Coating Materials and Method for Manufacturing the Same”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim, US 10,392,701 B2, 2019/08/27
1. “Method of Removing Oxide from Substrate and Method of Manufacturing Semiconductor Device Using the Same”, Il-Kwon Oh, Hyungjun Kim, US 9,780,172 B2, 2017/10/03
Pending (Domestic)
48. "Horizontally doping ALD ultrathin films and Manufacturing method there of" , Il-Kwon Oh, Byung-Ha Kwak, KR 10-2025-0016878, 2025/02/10
47. “Reverse Resistivity in Topological Semimetal Grown by Atomic Layer Deposition”, Il-Kwon Oh,
KR 10-2025-0018072, 2025/02/06
46. “Specialized Equipment by Applying Area-Selective Atomic Layer Deposition Technology”, Il-Kwon Oh, KR 10-2024-0167366, 2024/11/21
45. “Tin Oxide Semiconductor and Manufacturing Method Thereof”, Il-Kwon Oh, Yi-Ji Jeong,
KR 10-2024-0179836, 2024/12/05
44. “The Method for Manufacturing Metal Oxide Layers for Transistor Channels and The Metal Oxide Layers for Transistor Channels”, Il-Kwon Oh, Soon-Kyeong Park, KR 10-2024-0166294, 2024/11/20
43. “Capacitor and Electronic Device Including Capacitor, and Preparation Method Thereof”, Il-Kwon Oh, Minjeong Lee, Byoungjun Won, Youngjin Lim, KR 10-2024-0091384, 2024/07/10
42. “Apparatus for Testing Liquid Mass Flow Controller”, Il-Kwon Oh, So-Yeon Shin, Hye-Joo Kang, Soon-Kyeong Park, KR 10-2024-0000743, 2024/01/03
41. “Method for Forming a PN type Semiconductor”, Il-Kwon Oh, Dong-Hyun Lim, KR 10-2023-0177991, 2023/12/08
40. “A Method for Forming Tin Oxide”, Il-Kwon Oh, Yi-Ji Jeong, KR 10-2023-0177989, 2023/12/08[박1]
39. “Dysprosium-doped Hafnium Oxide thin film and method for manufacturing the same”, Il-Kwon Oh, KR 10-2023-0170871, 2023/11/30
38. “Capacitor and method of manufacturing capacitor”, Il-Kwon Oh, Minjeong Lee, Byoungjun Won, KR 10-2023-0018930, 2022/02/13
37. “Method for forming insulating layer by atomic layer deposition” Il-Kwon Oh, Minjeong Lee, Byoungjun Won, KR 10-2023-0079932, 2023/06/21
36. “Method for evaluating ramp of semiconductor thin film heating” Il-Kwon Oh, Yeonje You,
KR 10-2023-0006338, 2023/01/16
35. “Capacitor and method of manufacturing capacitor” Il-Kwon Oh, KR 10-2023-0018930, Il-Kwon Oh, 2023/02/13
34. “Dysprosium as a crystalline aligner in atomic layer deposition” Il-Kwon Oh, KR 10-2022-0164227, 2022/11/30
33. “Memristor device with 3-dimensional structure and manufacturing method” Il-Kwon Oh, KR 10-2022-0172772, 2022/12/12
32. “Manufacturing method of memristor device using selective deposition and memristor device” Il-Kwon Oh, KR 10-2022-0000262, 2022/01/03
31. “Apparatus and method for performing plasma enhanced atomic layer deposition by VHF” Il-Kwon Oh, KR 10-2021-18955, 2021/12/28
30. “Method for antimicrobial coating of wood”, Il-Kwon Oh, Woo-Hee Kim, KR 10-2018-0103532, 2018/08/31
29. “Method for Fabricating Semiconductor”, Il-Kwon Oh, Taejin Choi, Hyungjun Kim, KR 10-2018-0066670, 2018/06/11
28. “Method for Depositing Metal Oxide Films Including In Buffer Layers”, Il-Kwon Oh, Seoungi Seo, Yujin Lee, Hyungjun Kim, KR 10-2017-0016877, 2017/02/07
27. “Method for Depositing Metal Oxide Films By Plasma-Enhanced Atomic Layer Deposition”, Il-Kwon Oh, Seoungi Seo, Yujin Lee, Hyungjun Kim, KR 10-2017-0016878, 2017/02/07
26. “Method of Manufacturing a High Dielectric Thin Flm using 2-Dimensional Material with Surface Functionalized”, Il-Kwon Oh, Jong-suh Park, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2016-0032963, 2016/02/19
25. “Method for Forming Thin Film”, Il-Kwon Oh, Chang-Mo Yoon, Hyungjun Kim, KR 10-2016-0014605, 2016/02/05
24. “Method for Modifying Surface of Substrate Using Rare Earth Oxide Thin Film”, Il-Kwon Oh, Han-Bo-Ram Lee, Jun-Ho Choi, Hyungjun Kim, KR 10-2015-0178476, 2015/12/14
23. “Plasma Enhanced Atomic Layer Deposition Method Using an Additional Gas Injection”, Il-Kwon Oh, Han Earl Jung, Hyungjun Kim, KR 10-2015-0173265, 2015/12/07
22. “Display Device and Fabricating Method Thereof”, Il-Kwon Oh, Seunggi Seo, Ho-Jin Kim, ChoongKeun Yoo, YongBaek Lee, Hyungjun Kim, KR 10-2015-0168701, 2015/11/30
21. “A Functional Filter and Manufacturing Method of the Same”, Il-Kwon Oh, Chang-Mo Yoon, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2015-0171229, 2015/10/15
20. “Electric Device for MIM Capacitor Having Enhanced Electrical Characteristics and Manufacturing Method Thereof”, Il-Kwon Oh, Bo-Eun Park, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2015-0119039, 2015/08/24
19. “Electric Device for MIM Capacitor having Enhanced Electrical Characteristics and Manufacturing Method Thereof”, Il-Kwon Oh, Bo-Eun Park, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2015-0119048, 2015/08/24
18. “Apparatus for Plasma Enhanced Atomic Layer Deposition and Method for Forming Thin Film Oxides Using the Same”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2015-0042459, 2015/03/26
17. “Filter for Removing Moisture and Method for Manufacturing the Same”, Il-Kwon Oh, Chang-Mo Yoon, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2014-0194740, 2014/12/31
16. “Apparatus and Method for Performing Plasma Enhanced Atomic Layer Deposition Employing Very High Frequency”, Il-Kwon Oh, Gil-sang Yoo, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2014-0107123, 2014/08/18
15. “Superhydrophobic Coating Materials and Method for Manufacturing the Same” Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2014-0098866, 2014/08/01
14. “Method for Forming Coating Layer and Coating Material Having Waterproof Property”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim, KR 10-2014-0107123, 2014/08/01
13. “Epitaxial Growth of Dy-doped Hafnium Oxide”, Il-Kwon Oh, Jae-seung Lee, Hyungjun Kim, KR 10-2014-0002911, 2014/01/09
12. “Method for Reducing Native Oxide on Substrate and Method for Manufacturing a Semiconductor Device Using the Same”, Il-Kwon Oh, Hyungjun Kim, KR 10-2014-0001327, 2014/01/06
11. “A Deposition Method of Hafnium-Nitride Using Hydrogen Plasma and Semiconductor Device Using the Same”, Il-Kwon Oh, Min-Kyu Kim, Hyungjun Kim, KR 10-2013-0048935, 2013/04/30
Pending (International)
10. “Advanced precursors for selective atomic layer deposition using self-assembled monolayers”, Il-Kwon Oh, Stacey F Bent
US 17516139, 2022/5/5
9. “New precursors for selective atomic layer deposition of metal oxides with small molecule inhibitors”, Josiah Yarbrough, Il-Kwon Oh, Stacey F Bent
US 17514788, 2022/5/5
8. “Method for Forming Thin Film”, Il-Kwon Oh, Chang-Mo Yoon, Hyungjun Kim,
PCT/KR2016/014333, 2016/12/07
7. “Filter for Removing Moisture and Method for Manufacturing the Same”, Il-Kwon Oh, Chang-Mo Yoon, Han-Bo-Ram Lee, Hyungjun Kim,
PCT/KR2016/014106, 2016/12/02
6. “Display Device and Fabricating Method Thereof”, Il-Kwon Oh, Seunggi Seo, Ho-Jin Kim, ChoongKeun Yoo, YongBaek Lee, Hyungjun Kim,
EU 16201360.1, 2016/11/30
5. “Display Device and Fabricating Method Thereof”, Il-Kwon Oh, Seunggi Seo, Ho-Jin Kim, ChoongKeun Yoo, YongBaek Lee, Hyungjun Kim,
US 10396309, 2016/11/30
4. “Method for Forming Coating Layer and Coating Material Having Waterproof Property”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim,
US 14/814,888, 2015/07/31
3. “Superhydrophobic Coating Materials and Method for Manufacturing the Same”, Il-Kwon Oh, Han-Bo-Ram Lee, Hyungjun Kim,
US 14/815,797, 2015/07/31
2. “Method for Reducing Native Oxide On Substrate and Method for Manufacturing a Semiconductor Device Using the Same”, Il-Kwon Oh, Hyungjun Kim,
US 14/590,319, 2015/01/06
1. “Apparatus and method for performing plasma enhanced atomic layer deposition by VHF” Il-Kwon Oh, US 18/090,242, 2022/12/28